Sequencing Wafer Handler Moves To Improve Cluster Tool Performance
نویسنده
چکیده
Cluster tools can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves determines the time needed to complete a set of wafers. This paper presents scheduling problems for sequential and hybrid cluster tools and reviews the performance of several algorithms.
منابع مشابه
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تاریخ انتشار 2003